SURFACE TREATMENT ENABLING SUPER-CONFORMAL METAL CAP PROFILE ON MIDDLE OF-LINE (MOL) SILICIDES
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Sep 27, 2024
filing date -
Sep 27, 2024
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Abstract
A contact structure includes a cavity comprising a device contact formed on a surface of a substrate, a bottom surface, and sidewalls. A metal silicide layer disposed over the surface of the device contact, the bottom surface, and the sidewalls of the cavity, and a treated surface formed over a portion of the metal silicide layer disposed over the sidewalls of the cavity.
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