A SUPERCONTINUUM RADIATION SOURCE AND ASSOCIATED METROLOGY DEVICES
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United States of America
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Apr 3, 2025
app pub date -
Jan 23, 2023
filing date -
Jan 23, 2023
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Abstract
A supercontinuum radiation source including a pump laser arrangement for generating pump radiation and including a plurality of pump laser heads; a radiation combiner for combining the respective pump radiation from each pump laser head, and a non-linear fiber for receiving the pump radiation so as to excite a working medium within the non-linear fiber to generate supercontinuum radiation. Each pump laser head has dimensions no greater than 5 cm in any direction. Alternatively, or in addition the supercontinuum radiation source further includes a control arrangement for controlling the pump laser arrangement, the control arrangement configured for non-simultaneous emission of pulses from each pump laser head.
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