SLOW-LIGHT PHOTONIC MODULATORS FOR RADIO-FREQUENCY PHOTONIC SYSTEM
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United States of America
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Apr 3, 2025
app pub date -
Nov 7, 2022
filing date -
Nov 7, 2022
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Abstract
A slow-light photonic modulator includes a silicon-on-insulator substrate that includes a silicon device layer on top of a silicon dioxide buried layer. A ridge waveguide is formed partially etching the silicon device layer. The ridge waveguide includes a grating arm and a reference arm. A grating waveguide and a grating electrode are in the grating arm. A straight waveguide and a reference electrode are in the reference arm. A lateral junction is formed by doping the ridge waveguide with p-type and n-type dopants. In some embodiments, the slow-light photonic modulator further includes an unequal phase shifter architecture that is configured to set the modulator in quadrature without the use of external waveguide heaters.
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