Apparatus and Methods for Verifying Alignment Between a Shadow Ring and a Substrate
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Oct 2, 2023
filing date -
Oct 2, 2023
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Abstract
Methods and apparatus for verifying alignment between an opaque shadow ring and a substrate are provided. In some embodiments, the apparatus includes a tool comprising: a transparent ring having an inner edge defining a central opening and an outer edge and having a top side and a bottom side; a gauge mark on or in the transparent ring spaced between the inner edge and the outer edge, the gauge mark extending around the inner edge; and a pin extending from the bottom side of the transparent ring and located between the gauge mark and the outer edge.
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