POST-CHEMICAL MECHANICAL POLISHING CLEANING COMPOSITION, POST-CHEMICAL MECHANICAL POLISHING CLEANING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250109353A1
SERIAL NO

18894197

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An object of the present invention is to provide a means capable of sufficiently removing residues remaining on the surface of a polished object to be polished containing a silicon-containing material.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 452-8502

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ITO, Takahiro Aichi, JP 215 1732
OSHIMA, Natsuko Aichi, JP 1 0
YOSHINO, Tsutomu Aichi, JP 49 537

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation