CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION METHODS
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Oct 3, 2023
filing date -
Oct 3, 2023
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Abstract
A system, multifunctional chip, and fabrication method thereof are provided. For example, a method for use in fabricating an opto-electromechanical system includes generating, from a film of a material and a substrate on which the film is disposed, a suspended portion of the film by removing a first portion of the substrate such that the film's first portion becomes the suspended portion and a second portion of the film is adjacent to a second portion of the substrate after removing the substrate's first portion. A two-dimensional nanomaterial is thereafter transferred onto a section of the suspended portion of the film via an all-dry process. A cantilever is thereafter generated from the film's suspended portion and extends from the film's second portion. The two-dimensional nanomaterial is disposed on the cantilever. Other aspects and features are also claimed and described.
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