MEMS STRUCTURES WITH GAPS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250109012A1
SERIAL NO

18896296

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A device is provided that includes a stator including a stator element and a row of stator comb fingers, wherein the stator comb fingers extend away from the stator element in a y-direction. A device may include a rotor including a rotor element and a row of rotor comb fingers, wherein the rotor comb fingers extend away from the rotor element in a direction which is opposite to the y-direction, and wherein the stator comb fingers are interdigitated with the rotor comb fingers, and form an interdigitated row, and each pair of adjacent stator comb finger and rotor comb finger are separated from each other by a x-gap in a x-direction, which is perpendicular to the y-direction.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTD10-1 HIGASHIKOTARI 1-CHOME NAGAOKAKYO-SHI KYOTO-FU 617-8555

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HANNULA, Konsta Sipoo, FI 3 0
PARTANEN, Mikko Vantaa, FI 8 2

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