PART TRANSPORTING DEVICE AND PROCESSING SYSTEM

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250108525A1
SERIAL NO

18979706

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MATSUDA, Toshiya Fuchu City, Tokyo, JP 24 50
MOYAMA, Kazuki Miyagi, JP 46 1155
NAGASEKI, Kazuya Miyagi, JP 96 3054

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