PART TRANSPORTING DEVICE AND PROCESSING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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N/A
Issued Date -
Apr 3, 2025
app pub date -
Dec 13, 2024
filing date -
Dec 13, 2024
priority date (Note) -
Published
status (Latency Note)
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Importance

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Abstract
A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.

First Claim
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TOKYO ELECTRON LIMITED | TOKYO |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
MATSUDA, Toshiya | Fuchu City, Tokyo, JP | 24 | 50 |
MOYAMA, Kazuki | Miyagi, JP | 46 | 1155 |
NAGASEKI, Kazuya | Miyagi, JP | 96 | 3054 |
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