POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Oct 3, 2023
filing date -
Oct 3, 2023
priority date (Note) -
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Abstract
A carrier head for chemical mechanical polishing includes a housing for attachment to a drive shaft, a membrane assembly arranged beneath the lower carrier body, and a flexure. The membrane assembly includes a membrane support and a flexible membrane secured to the membrane support to defining a plurality of pressurizable lower chambers, with the flexible membrane having a lower surface that provides a substrate mounting surface. A flexible seal forms a pressurizable upper chamber between the housing and the membrane support. The flexure connects the membrane support to the housing, and the flexure extends through the pressurizable upper chamber.
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