SAPPHIRE LAMP FOR LASER SUSTAINED PLASMA BROADBAND LIGHT SOURCE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20250106973A1
SERIAL NO

18884880

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser-sustained broadband light source is disclosed. The light source may include a gas containment structure for plasma generation. The gas containment structure may include a first portion formed from a first grade of sapphire and a second portion formed from a second grade of sapphire. The first portion is coupled to one or more sections of the second portion of second grade sapphire. The light source may include sapphire-to-sapphire bonding between the first-grade sapphire of the first portion and the second-grade sapphire of the second portion, thereby eliminating metal-to-sapphire brazing and avoiding exposure of metal components to destructive UV and/or VUV light. The light source may include a primary laser pump source configured to direct a primary pump beam into the gas containment structure to sustain a plasma and a light collector element configured to collect broadband light emitted from the plasma.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Mountain View, US 73 532
Gluchko, Sergei San Jose, US 1 0
Khodykin, Oleg Santa Cruz, US 24 328
Shchemelinin, Anatoly Bozeman, US 52 507

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