BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND FILTER
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United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Aug 30, 2022
filing date -
Aug 30, 2022
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Abstract
A bulk acoustic wave resonator, a manufacturing method thereof and a filter are provided and belong to the technical field of radio frequency micro-electro-mechanical system. The resonator includes a dielectric substrate, a first electrode, a piezoelectric layer, and a second electrode. The dielectric substrate has a first cavity penetrating through the dielectric substrate in a thickness direction thereof, and the first cavity includes a first opening penetrating through the first surface, and a second opening penetrating through the second surface. The first opening includes first sides sequentially arranged in a clockwise direction, and first connecting sides each connecting two adjacent first sides; the second opening includes second sides sequentially arranged in a clockwise direction, and second connecting sides each connecting two adjacent second sides. The first sides are in one-to-one correspondence with the second sides, and the first connecting sides are in one-to-one correspondence with the second connecting sides.
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