SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

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United States of America Patent

APP PUB NO 20250105816A1
SERIAL NO

18973205

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Resonator and filter devices and methods of fabrication. A resonator chip includes a substrate, a piezoelectric plate, and an acoustic Bragg reflector between the substrate and a back surface of the piezoelectric plate. A conductor pattern on a surface of the piezoelectric plate includes a first plurality of contact pads and an interdigital transducer (IDT). The acoustic Bragg reflector is configured to reflect the shear primary acoustic mode. An interposer has a second plurality of contact pads on a back surface. A seal connects a perimeter of the piezoelectric plate to a perimeter of the interposer. Each contact pad of the first plurality of contact pads is directly connected to a respective contact pad of the second plurality of contact pads.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CONAGAOKAKYO-SHI 26-10 TENJIN 2-CHOME KYOTO-FU 617-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garcia, Bryant Mississauga, CA 127 2732
Hammond, Robert B Rockville, US 72 1997
John, Jesson Dublin, US 26 1084
Plesski, Viktor Gorgier, CH 98 3449
Turner, Patrick Portola Valley, US 141 3419
Yandrapalli, Soumya Amsterdam, NL 38 1403
Yantchev, Ventsislav Sofia, BG 138 3509

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