PIEZOELECTRIC CERAMIC ACTUATOR AND CONTROL METHODS
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United States of America Patent
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Mar 27, 2025
app pub date -
Sep 27, 2023
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Sep 27, 2023
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Abstract
Embodiments provide an integrated actuator and pressure sensor with closed-loop feedback of capacitance, resulting in improved actuation performance and cost-effective form factor. The disclosed integrated piezoelectric ceramic actuator comprises a capacitance sensing unit, and a piezoelectric ceramic. It operates in either actuation mode or pressure sensing mode. During the actuation operation mode, the integrated actuator generates a first control signal based on the capacitance measured at the capacitance sensing unit. During the pressure sensing operation mode, the working parameters corresponding to pressure applied to the piezoelectric ceramic are determined based on the measured capacitances.
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