APPARATUS FOR CORRECTING ASTIGMATISM OF A LASER BEAM

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United States of America Patent

APP PUB NO 20250105577A1
SERIAL NO

18976404

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for transmitting and/or reflecting a laser beam for at least partially correcting astigmatism of the laser beam includes an optical element for transmitting and/or reflecting the laser beam. The optical element is deformable by an external force. The apparatus further includes at least four supports for the optical element arranged along an imaginary circle. The at least four supports are aligned diametrically opposite one another in pairs. The apparatus further includes at least two deformation elements for exerting the external force on the optical element. The at least two deformation elements are arranged diametrically to one another with respect to a center of the imaginary circle through the at least four supports. Each of the at least two deformation elements is arranged on an angle bisector of an angle defined by two adjacent supports and the center of the imaginary circle through the at least four supports.

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Patent Owner(s)

Patent OwnerAddress
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBHJOHANN-MAUS-STRASSE 2 DITZINGEN 71254

International Classification(s)

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  • 2024 Application Filing Year
  • G02B Class
  • 4679 Applications Filed
  • 265 Patents Issued To-Date
  • 5.67 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ergin, Tolga Bietigheim-Bissingen, DE 6 12
Hopf, Andreas Möglingen, DE 11 15
Lambert, Martin Korb, DE 30 134
Schlosser, Oliver Filderstadt, DE 3 0
Wägerle, Jens Kirchheim, DE 1 0

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges2720201 - 10020040060080010001200140016001800200022002400260028003000

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