METHOD OF PROCESSING WAFER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20250105167A1
SERIAL NO

18887709

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method is of processing a wafer that includes on a side of a front surface a plurality of intersecting planned dividing lines and a plurality of devices formed in respective areas defined by the planned dividing lines, and a metal layer laminated on a side of a back surface. The method includes: forming a mark indicating positions of the planned dividing lines of the wafer on the back surface; and dicing the wafer from the side of the back surface using the formed mark as a reference to divide the wafer into individual chips.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KUBO, Atsushi Tokyo, JP 91 657
YAMAMOTO, Naoko Tokyo, JP 53 519

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation