PEDESTAL HEATER
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Mar 27, 2025
app pub date -
Sep 4, 2024
filing date -
Sep 4, 2024
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
Disclosed herein are a pedestal heater and processing chamber containing the same. In one example, a pedestal heater for semiconductor substrate processing includes a heater body, a top cover and a bottom cover. The heater body includes at least one heating element. The top cover is disposed on a top surface of the heater body and has a higher thermal conductivity than the heater body. The bottom cover is disposed at a bottom surface of the heater body. In some examples, lift pin holes disposed through the top cover, the heater body and the bottom cover are aligned to accommodate lift pins.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully