METHOD FOR CALCULATING EFFECTIVE TEMPERATURE OF MULTI-CHARGED PARTICLE BEAM WRITING REGION, MULTI-CHARGED PARTICLE BEAM WRITING METHOD, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM, AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS
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United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Oct 1, 2024
filing date -
Oct 1, 2024
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Abstract
Method for calculating an effective temperature of a multi-charged-particle-beam writing region includes calculating a representative value of a dose of a beam to be applied to a mesh region concerned, as a dose representative value, for each of plural mesh regions obtained by dividing, in a writing direction and a linearly independent first direction to the writing direction, a writing region of a target object to be irradiated with multiple-charged-particle-beams; and calculating, as an effective temperature of each of the plural mesh regions, a representative value of an increased temperature given to each of the plural mesh regions by heat due to beam irradiation, by performing convolution processing between the dose representative value and a kernel determined by a speed of a stage with the target object thereon, and a size in the writing direction of a beam array region of the multiple-charged-particle-beams on the surface of the target object.
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