ADAPTIVE TARGET CONTROL FOR CURVILINEAR OPTICAL PROXIMITY CORRECTION (OPC)
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Mar 27, 2025
app pub date -
Sep 27, 2023
filing date -
Sep 27, 2023
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Aspects of the disclosed technology relate to techniques for achieving optical proximity correction. Anchor points in a layout design may be designated as more important or less important. Optical proximity correction iterations are performed on each of the plurality of regions to generate a modified layout design by processing the more important anchor points differently than the less important anchor points, such as by different weighting or by dynamically changing the target for the less important anchor points. In this way, the edge placement error may be reduced or eliminated for the more important anchor points.
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