DIFFERENTIAL EVACUATION DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Aug 16, 2024
filing date -
Aug 16, 2024
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Abstract
A differential evacuation device includes a connection pipe connecting a first chamber which outputs extreme ultraviolet light and a second chamber to which the extreme ultraviolet light is input, a first partition wall including a first opening and a first partition plate being arranged such that the extreme ultraviolet light passes through the first opening, a second partition wall including a second opening and a second partition plate being arranged such that the extreme ultraviolet light passes through the second opening, and a first exhaust port exhausting a gas in a first differential evacuation chamber between the first partition wall and the second partition wall. Here, the first partition wall is arranged such that the second opening is surrounded by a portion outside a first high pressure region where a pressure is highest in pressure distribution at the second partition plate on the first differential evacuation chamber side.
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