CONTACTS FOR REDUCING WEAR IN A RETICLE CONTAINER

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United States of America Patent

APP PUB NO 20250102901A1
SERIAL NO

18892069

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Reticle contacts for use in a reticle container are provided having further features for wear reduction. The wear reduction features include one or more of a ring-shaped projection or one or more elongate arcing projections from a reticle contact region, one or more reliefs such as ring-shaped trenches provided in a reticle contact region, or one or more reliefs provided by having relatively thinner regions of the reticle contact region.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Raschke, Russ V Chanhassen, US 42 118
Wang, Huaping Eden Prairie, US 21 57

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