SENSOR FOR DETECTING GAS AND GAS FLOW AND METHOD FOR MANUFACTURING SENSOR ELEMENT OF SENSOR
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United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Sep 16, 2024
filing date -
Sep 16, 2024
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Abstract
A sensor element has a substrate, a channel formed in the substrate, and serving as an inlet passage of the gas, a plurality of micro-scale pillars formed in the channel and interfering with the flow of the gas moving through the channel, and a conductive layer formed on a surface of the plurality of pillars by deposition. A sensor has the sensor element, and a metering module electrically connected to the conductive layer, and configured to measure an electrical signal generated by the interference of the plurality of pillars with the flow of the gas.
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