WEIGHING DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Jan 13, 2023
filing date -
Jan 13, 2023
priority date (Note) -
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Abstract
A weighing device for performing a weight measurement on a semiconductor wafer having a specific diameter, the weighing device comprising a weighing pan for supporting the wafer during the weight measurement, wherein: the weighing pan is grounded; and the weighing pan is configured to extend over at least 25% of an area of a surface of the wafer that faces the weighing pan.
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