FILM FORMING APPARATUS
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United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Dec 9, 2024
filing date -
Dec 9, 2024
priority date (Note) -
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Abstract
A film forming apparatus includes: a processing container, a stage provided in the processing container in a liftable and lowerable manner; a shower head facing the stage and having a plurality of gas holes, a lifting and lowering mechanism configured to lift the stage when film formation is to be performed to form a processing space between the shower head and the stage, and a measurer configured to measure a gap between the shower head and the stage.
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