PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
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United States of America Patent
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Issued Date -
Mar 27, 2025
app pub date -
Sep 10, 2024
filing date -
Sep 10, 2024
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Abstract
A probe including a shell, an ultrasonic transducer unit, and at least one circuit board is provided. The ultrasonic transducer unit is disposed in the shell and includes a substrate, a vibrating membrane, and an anti-resonance structure. The vibrating membrane is disposed on the substrate and forms a cavity with the substrate. The anti-resonance structure is disposed on one side of the substrate facing away from the vibrating membrane and includes a hard layer and a glue layer connected to each other. The density of the glue layer is different from the density of the hard layer. The at least one circuit board is electrically coupled to the ultrasonic transducer unit. A method of fabricating the ultrasonic transducer unit is also provided.
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