SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20250100161A1
SERIAL NO

18974213

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method includes receiving a carrier, the carrier including a carrier body, a first filter, and a housing securing the first filter to the carrier body. The method further includes uninstalling the housing from the carrier, replacing the first filter with a second filter, reinstalling the housing on the carrier body, and inspecting the second filter. Inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, Yi-Ming Sindian City, TW 133 594
HUNG, Cheng-Ho Tainan City, TW 6 8
LI, Fu-Hsien Taichung City, TW 36 25
LIN, Chih-Wei Taichung City, TW 359 5145
WANG, Jen-Ti Taichung City, TW 20 21

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation