METHOD AND APPARATUS FOR PRODUCING INORGANIC POWDER USING CHEMICAL VAPOR SYNTHESIS

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United States of America Patent

APP PUB NO 20250100050A1
SERIAL NO

18890420

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Provided is a method and apparatus for producing inorganic powder using chemical vapor synthesis (CVS), the method and apparatus being capable of increasing a production yield by suppressing side reactions and of increasing continuous process stability by preventing reactor blockage, and the method includes supplying a precursor, supplying a side reaction prevention gas capable of preventing side reactions of the precursor, to the precursor, supplying a reaction gas to the precursor, and forming inorganic powder due to a chemical reaction between the precursor and the reaction gas.

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Patent Owner(s)

Patent OwnerAddress
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY89 YANGDAEGIRO-GIL IPJANG-MYEON SEOBUK-GU CHOONGCHEONGNAM-DO CHEONAN-SI 31056

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jeong, Youngkyu Hwaseong-si, KR 4 0
Kwon, Ohyung Gangneung-si, KR 7 58
Park, Gyeongbae Gangneung-si, KR 2 0
YANG, Seungmin Gangneung-si, KR 6 9

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