METHOD AND SYSTEM FOR PROVIDING A RELIABLE ISOLATION STACK IN CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
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United States of America Patent
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Mar 27, 2025
app pub date -
Sep 27, 2023
filing date -
Sep 27, 2023
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Abstract
Methods and systems for providing a reliable (i.e., defect mitigated) isolation stack in capacitive micromachined ultrasonic transducers (CMUTs) are disclosed. A capacitive micromachined ultrasonic transducer (CMUT) includes a top electrode and a bottom electrode. The CMUT includes a sidewall between the top electrode and the bottom electrode. The sidewall is configured to separate the top electrode and the bottom electrode by a gap. The CMUT includes an isolation stack part on one or both of a bottom side of the top electrode or a top side of the bottom electrode. The isolation stack part includes a silicon dioxide layer, and a partially oxidized silicon nitride comprising a silicon nitride layer and an oxidized nitride layer.
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