METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
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United States of America
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Mar 20, 2025
app pub date -
Jan 31, 2024
filing date -
Jan 31, 2024
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Abstract
The present invention relates to a method for manufacturing an electrostatic chuck, and more specifically, to a method for manufacturing an electrostatic chuck with minimized temperature deviation. The method of the present invention includes: a step S10 of forming a metal layer by depositing metal on a lower portion of a base containing a ceramic material and provided with an ESC electrode at an upper portion thereof; and a step S20 of forming a heater electrode by forming a pattern on the metal layer using a photolithography process.
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