Bulk Acoustic Wave Resonance Assembly and Method for Manufacturing Same
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
May 13, 2024
filing date -
May 13, 2024
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Abstract
The present application discloses a bulk acoustic wave resonance assembly and a method for manufacturing the same. The bulk acoustic wave resonance assembly of the present application includes a substrate, a first resonance assembly and a second resonance assembly which are arranged on the substrate; an interconnection region is formed between the first resonance assembly and the second resonance assembly; the first resonance assembly includes a first bottom electrode, a first piezoelectric layer, and a first top electrode which are arranged on the substrate in sequence; the second resonance assembly includes a second bottom electrode, a second piezoelectric layer, and a second top electrode which are arranged on the substrate in sequence; the first bottom electrode and the second top electrode are connected to each other in the interconnection region; and the second bottom electrode and the first top electrode are connected to each other in the interconnection region.
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