COMPOSITE SUBSTRATE AND METHOD FOR PRODUCING COMPOSITE SUBSTRATE
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Nov 27, 2024
filing date -
Nov 27, 2024
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Abstract
A composite substrate includes: a support substrate having an upper surface and a lower surface that are opposed to each other; a piezoelectric layer arranged on the upper surface side of the support substrate; and an intermediate layer arranged between the support substrate and the piezoelectric layer, wherein, in an end portion of the support substrate on the upper surface side, a low crystalline region having a lower crystallinity as compared to a region positioned on the lower surface side is formed.
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