METAL RIBS IN ELECTROMECHANICAL DEVICES

United States of America

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Issued Date
Mar 20, 2025
app pub date
Dec 3, 2024
filing date
Dec 3, 2024

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Abstract

In examples, a device comprises a semiconductor die, a thin-film layer, and an air cavity positioned between the semiconductor die and the thin-film layer. The air cavity comprises a resonator positioned on the semiconductor die. A rib couples to a surface of the thin-film layer opposite the air cavity.

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Patent Owner(s)

Patent Owner	Address
TEXAS INSTRUMENTS INC	TEXAS USA TEXAS

International Classification(s)

H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
MATSUURA, Masamitsu	Beppu, JP	35	71
NGUYEN, Hau	San Jose, US	29	87
PODDAR, Anindya	Sunnyvale, US	96	798

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METAL RIBS IN ELECTROMECHANICAL DEVICES

Number of patents in Portfolio can not be more than 2000

United States of America

18966299

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18966299

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Abstract

First Claim

Family

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Full Text

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