BULK ACOUSTIC WAVE DEVICES HAVING ELECTRODES WITH ACOUSTIC IMPEDANCE GRADIENTS TO IMPROVE COUPLING EFFICIENCY AND RELATED FABRICATION METHODS
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Sep 18, 2023
filing date -
Sep 18, 2023
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Abstract
BAW devices include a piezoelectric layer with a first electrode layer on one face and a second electrode layer on the opposite face. The piezoelectric layer and electrode layers determine a coupling efficiency of the BAW devices, which is a measure of the acoustic response of the piezoelectric layer to an input signal. In a BAW device, a first side of the first electrode layer comprises a first material adjacent to a first face of the piezoelectric layer, and a second side of the first electrode layer, opposite to the first face of the piezoelectric layer, comprises a second material, where the first material and the second material have different acoustic impedances. An electrode layer with an acoustic impedance gradient increases the coupling efficiency of the BAW devices.
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