METAL TIP-TO-TIP SCALING
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Sep 19, 2023
filing date -
Sep 19, 2023
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Abstract
Embodiments provide metal tip-to-tip scaling for metal contacts. A structure includes a first metal line and a second metal line. The structure includes a spacer separating the first metal line from the second metal line, the spacer including a flat surface and curved tips, where the flat surface abuts the first metal line and the curved tips abut the second metal line.
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