BACKSIDE FUSE CONNECTED TO BACKSIDE BACK END OF THE LINE NETWORK
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Sep 20, 2023
filing date -
Sep 20, 2023
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Abstract
A semiconductor integrated circuit (IC) device that includes a backside fuse structure. The backside fuse structure is located within the backside of the semiconductor IC device and may be vertically located between a microdevice and a backside back end of the line (BEOL) network. The backside fuse structure includes at least a fuse wire. The backside fuse structure may be in a non-programmed state or a programmed state. When in a non-programmed state, an open circuit exists that prevents current flow through the fuse wire. The backside fuse structure may be directly connected to a deep via contact and/or one or more conductive pathways within the backside BEOL network.
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