SURFACE PROCESSING METHOD

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United States of America

APP PUB NO 20250096002A1
SERIAL NO

18968014

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Abstract

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A surface processing method for planarizing a processing surface of a workpiece includes the following procedures, treatments, or processes. With a wheel layer and the processing surface of the workpiece facing each other with an alkaline electrolyte solution between them, an oxide is formed on the processing surface of the workpiece by anodic oxidation by passing a current through the workpiece as an anode. The oxide formed on the processing surface by the anodic oxidation is removed by using the wheel layer.

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Patent Owner(s)

Patent OwnerAddress
DENSO CORPORATION1-1 SHOWA-CHO KARIYA-CITY AICHI-PREF 448-8661

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
AOKI, Kazufumi Kariya-city, JP 27 90
FURUKAWA, Ryuta Kariya-city, JP 2 0
HORI, Kantaro Kariya-city, JP 2 0
KATO, Yuya Kariya-city, JP 56 182
MARUNO, Naoki Kariya-city, JP 25 203
SOLTANI, Bahman Kariya-city, JP 11 3

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