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Abstract

Disclosed is an operating method of an electronic device which includes a processor and supports manufacture of a semiconductor device. The method includes receiving, at the processor, layout data for the manufacture of the semiconductor device, feature data of the layout data, and skew data after the semiconductor device is manufactured; inferring, at the processor, a center and a distribution of a skew of each of patterns and/or edges of the layout data based on the layout data and the feature data, by using a deep learning module; calculating, at the processor, a loss based on the center and the distribution of the skew based on the skew data, and training, at the processor, the deep learning module based on the loss, and the layout data, the feature data, and the skew data are formatted as tabular data.

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First Claim