TEMPLATE SUBSTRATE AND MANUFACTURING METHOD AND MANUFACTURING APPARATUS THEREOF, SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD AND MANUFACTURING APPARATUS THEREOF, SEMICONDUCTOR DEVICE, AND ELECTRONIC DEVICE
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Jul 8, 2022
filing date -
Jul 8, 2022
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Abstract
A template substrate includes a main substrate containing silicon and including an edge, a mask located above the main substrate and including an opening portion, a seed portion located at the opening portion above the main substrate, and a protecting portion overlapping the edge when viewed from a side and containing a material different from gallium.
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