PROBER, PERFORMANCE BOARD, PROBE CARD, AND SUBSTRATE INSPECTING APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250093384A1
SERIAL NO

18817410

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In one embodiment, a prober includes a stage configured to hold a substrate as an inspection object. The prober further includes a housing configured to hold a probe card that can be electrically connected to the substrate, and hold a performance board that can be electrically connected to the probe card. Moreover, the housing is configured to function as a ground line, and includes a connection path configured to electrically connect the probe card and the performance board.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KAMATA, Hiroki Yokohama, JP 4 22

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