DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR MANUFACTURING SAID DEVICE
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Jan 17, 2023
filing date -
Jan 17, 2023
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Abstract
A probe device for nanoscale thermal measurements including an insulating lever, a tip protruding from the insulating lever, a microstructured layer of Niobium Nitride (NbN) extending over only a part of the tip and covering an apex of the tip and/or covering at least one area adjoining the apex of the tip and/or covering, only partly, the insulating lever and at least two conductive leads extending from the insulating lever to the microstructured NbN layer.
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