VIBRATION-MONITORED LASER OPTICAL UNIT
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United States of America
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Mar 20, 2025
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Nov 28, 2024
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Nov 28, 2024
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Abstract
A method for monitoring a laser optical unit of a laser system includes guiding a laser beam through the laser optical unit, performing a first measurement of vibrations arising in the laser optical unit, structure-borne sound arising in the laser optical unit, and/or sound arising in the laser optical unit by using a sensor, and generating an output of the first measurement, and/or an output of a change of the vibrations, of the structure-borne sound, and/or of the sound.
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