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Abstract

Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SF₆ undergoes decomposition under the synergistic effect of photocatalysis and plasma, SF₆ is decomposed to generate fluorine atoms and low-fluorine sulfides such as SF₅ and SF₄. The generated fluorine ions, SF₅, SF₄ and low-fluorine sulfides further react with metal tungsten to generate WF₆ specialty gas, which not only realizes the utilization of fluorine resources of SF₆, but also replaces highly toxic fluorine gas with non-toxic SF₆ exhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.

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First Claim