COMPOUND SENSOR AND MANUFACTURING METHOD
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Apr 5, 2024
filing date -
Apr 5, 2024
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Abstract
A compound sensor includes a package, a first acceleration detector, a second acceleration detector, and an angular velocity detector. The first acceleration detector is disposed in a first cavity. The second acceleration detector is disposed in a second cavity. The angular velocity detector is disposed in a third cavity. An inner pressure of the first cavity is higher than an inner pressure of the second cavity. An inner pressure of the third cavity is lower than the inner pressure of the second cavity.
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