SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Sep 3, 2024
filing date -
Sep 3, 2024
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Abstract
A microelectromechanical system (MEMS) mirror device includes a frame that defines a frame cavity; a suspension assembly; and a mirror body coupled to the frame by the suspension assembly such that the mirror body is suspended over the frame cavity. The mirror body comprises a sandwich structure that includes a front plate, a back plate, and a hollow core assembly arranged between the front plate and the back plate. The front plate and the back plate define a thickness dimension of the mirror body. The hollow core assembly includes a plurality of support structures that extend between the front plate and the back plate and define a plurality of cavities between the front plate and the back plate.
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