Importance

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Abstract

Disclosed is an ultrasonic transducer including a substrate and multiple ultrasonic transducer units. The substrate has an ultrasonic transceiver area. The ultrasonic transducer units, each including a first electrode, multiple first cavities and a second electrode, are arranged at intervals on the substrate along a first direction. The first electrode and the first cavities, which overlap the first electrode, are disposed in the ultrasonic transceiver area. The first cavities are arranged at intervals along a second direction. The second electrode extends on the first cavities along the second direction, overlapping the first electrode and the first cavities. The second electrode is electrically-insulated from the first electrode. The second electrode has a first width along the first direction in the ultrasonic transceiver area, and the first width of the second electrode remains fixed or unchanged along the second direction. A method of fabricating the ultrasonic transducer is also provided.

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First Claim