NOZZLE MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Jul 24, 2024
filing date -
Jul 24, 2024
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Abstract
A nozzle module includes a base portion; a nozzle portion disposed on the base portion, and including a first body, and a nozzle portion reciprocating in a first movement direction; and a vessel unit disposed to face the nozzle portion, and including a second body reciprocating in a second movement direction, and an accommodation portion concavely formed inwardly from an upper surface of the second body.
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