OPENING/CLOSING MECHANISM, EXHAUST SWITCHING MECHANISM, AND SUBSTRATE PROCESSING DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Mar 20, 2025
app pub date -
Sep 19, 2024
filing date -
Sep 19, 2024
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
An opening/closing mechanism includes a base member that can be attached to attachment openings of a switching box, an upper support member provided on an upper surface of the base member, an actuator, a rod extended downward from the actuator while penetrating the base member and moved in an up-down direction by the actuator, a lower support member provided on a lower surface of the base member, a lid member provided below the base member and capable of closing a communication port, and a first link and a second link provided below the base member and configured to connect the rod, the lower support member, and the lid member. The movement of the rod is transmitted to the lid member via the first link and the second link, so that the lid member is switched between an open state and a closed state.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully