PIEZOELECTRIC TRENCHES INTERLEAVED WITH HEAVY-METAL ELECTRODES OF A SAW RESONATOR
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Aug 6, 2024
filing date -
Aug 6, 2024
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Abstract
A surface acoustic wave (SAW) resonator device is provided. The SAW resonator device includes a first electrode positioned on an upper surface of a piezoelectric film. The first electrode may include a plurality of layers wherein a layer of the plurality of layers is a first heavy metal layer. The SAW resonator device may also include a first piezoelectric trench (PZT) positioned adjacent to the first electrode. The first PZT includes a recess in the piezoelectric film.
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