ACOUSTIC WAVE DEVICE, FILTER, MULTIPLEXER, AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

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United States of America

APP PUB NO 20250088165A1
SERIAL NO

18824825

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Abstract

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An acoustic wave device includes a piezoelectric layer provided with a part of the piezoelectric layer between lower and upper electrodes and having a through hole along a resonance region, an insertion film provided between the lower electrode and the piezoelectric layer and having a resistivity higher than those of the lower electrode and the upper electrode, a first film provided on a side of the upper electrode, a second film provided between the side surface of the upper electrode and the first film, and a third film provided between the side surface of the upper electrode and the second film or between the first film and the second film, a concentration of a first element of the third film being higher than that of the second film and a concentration of a second element of the third film being lower than that of the second film.

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Patent Owner(s)

Patent OwnerAddress
TAIYO YUDEN CO LTD7-19 KYOBASHI 2-CHOME CHUO-KU TOKYO 104-0031

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FUJITA, Norihito Tokyo, JP 61 1472

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