METHOD FOR MANUFACTURING VIBRATION POWER GENERATION DEVICE AND VIBRATION DEVICE
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United States of America
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Mar 13, 2025
app pub date -
Sep 6, 2024
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Sep 6, 2024
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Abstract
A method for manufacturing a vibration power generation device includes: first silicon substrate patterning for patterning a first silicon substrate to form a first support portion and a fixed electrode finger; second silicon substrate patterning for patterning a second silicon layer of a second silicon substrate in which a first silicon layer and the second silicon layer are laminated to form a movable electrode finger and patterning the first silicon layer to form a second support portion and a movable portion; electret film forming for forming an electret film at one of the movable electrode finger and the fixed electrode finger; and bonding for bonding the first silicon substrate to the second silicon layer side of the second silicon substrate such that the movable electrode finger and the fixed electrode finger face each other.
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