SEMICONDUCTOR MANUFACTURING APPARATUS

United States of America

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Issued Date
Mar 13, 2025
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Feb 8, 2024
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Feb 8, 2024

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Abstract

A semiconductor manufacturing apparatus according to the present embodiment includes a stage configured to support a semiconductor wafer. A probe card is positioned above the stage. A first electrode is formed of a conductive material, is movable on the stage from an outer side of the stage toward a center, and is contactable with a side surface of the semiconductor wafer.

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Patent Owner(s)

Patent Owner	Address
KABUSHIKI KAISHA TOSHIBA	KANAGAWA KANAGAWA
TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION	1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HASEBE, Shun	Nonoichi Ishikawa, JP	1	0

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SEMICONDUCTOR MANUFACTURING APPARATUS

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United States of America

18437119

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18437119

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